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M07500 - SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers StdPbc-1020 This Specification describes a coded

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Description

This Specification describes a coded alphanumeric marking of silicon or other semiconductor wafers

本スタンダードは450TFCとロードポート間の機械的インタフェースのみ標準化する。

SEMI F78-0611 (Reapproved 0917)

the back surface of which may be polished or acid etched

The alphanumeric marking of this Specification is valid for a broad range of wafer products (e

M07500 - SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers StdPbc-1020 This Specification describes a codedThe purpose of this Document is to define standard descriptions for the parameters to be specified in the procurement and supply of round wafers of gallium antimonide (GaSb) monocrystalline material. This Specification covers the information required for the procurement of round, flatted GaSb wafers and the standard dimensional and orientation conventions for the supply of such wafers. Referenced SEMI StandardsSEMI MF26 Test Method for Determining the

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